{
  "title": "Chemical-Mechanical Planarization(CMP)",
  "kind": "reference",
  "company": "GRISH / Beijing Grish Hitech",
  "category": "Lapping, honing & superfinishing",
  "parameters": {
    "Brand / publisher": "GRISH",
    "Content type": "glossary",
    "Language": "English"
  },
  "language": "en",
  "source_url": "https://grish.com/term/chemical-mechanical-planarization-polish-cmp/",
  "content_html": "<p>A combination of mechanical grinding and chemical etching, it forms a smooth and flat surface on the surface of the product with the help of the ultra-micro particles grinding and chemical etching.</p>\n",
  "summary": "A combination of mechanical grinding and chemical etching, it forms a smooth and flat surface on the surface of the product with the help of the ultra-micro particles grinding and chemical etching.",
  "sections": [],
  "updated_at": "2026-10-16"
}