{
  "title": "CMP Slurry",
  "kind": "product",
  "company": "GRISH / Beijing Grish Hitech",
  "category": "Compounds & slurries",
  "parameters": {
    "Brand / publisher": "GRISH",
    "Content type": "products",
    "Language": "English"
  },
  "language": "en",
  "source_url": "https://grish.com/product/cmp-slurry/",
  "content_html": "<div>\n      <div>\n        \n        <div>\n          <div>\n  <div>\n    <ul>\n              <li>\n          <div>\n            <div><img src=\"/files/grish-asset-2f19acb58e11010b9745bb84/CMP-Slurry-3-1.png\" alt=\"\" loading=\"lazy\" decoding=\"async\"></div>\n          </div>\n                  </li>\n              <li>\n          <div>\n            <div><img src=\"/files/grish-asset-a1dbdf94738ecb89c23fc276/slurry.png\" alt=\"\" loading=\"lazy\" decoding=\"async\"></div>\n          </div>\n                  </li>\n          </ul>\n  </div>\n  \n</div>\n          \n\n          <div>\n            <span>Polishing Slurry</span>\n            <h2>CMP Slurry</h2>\n                          <div>\n                GRISH CMP slurry is mainly based on colloids. The formula made through scientific proportioning can ensure the stability of pH value during the polishing process, thereby ensuring the stability of the polishing rate and saving time. CMP slurries are widely used in mechanical polishing of various nanoscale materials, such as sapphire materials, metals, composite crystals, etc.              </div>\n            \n            \n\n            <div>\n              <ul>\n                <li>\n                  <i></i>\n                  <p>Fast and safe logistics</p>\n                </li>\n                <li>\n                  <i></i>\n                  <p>Get samples for free</p>\n                </li>\n              </ul>\n            </div>\n          </div>\n        </div>\n      </div>\n    </div>\n    \n<div>\n      \n    <div>\n      \t\t<div>\n\t\t\t\t\t\t<section>\n\t\t\t\t\t\t<div>\n\t\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t<h2>Take a Closer Look at CMP Slurry</h2>\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t\t</div>\n\t\t</section>\n\t\t\t\t<section>\n\t\t\t\t\t\t<div>\n\t\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t<h3>What is a CMP slurry?</h3>\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t<p>CMP Slurry, also known as Chemical Mechanical Planarization, is a liquid dispersion containing active chemicals and micro-abrasive grains used for a variety of industrial applications. This process removes materials by a combination of chemical and mechanical action and is composed of oxidizers, chelating agents, and corrosion inhibitors.</p>\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t<p>When used in semiconductor and membrane production, the CMP slurry is designed to precisely remove materials from a given surface in order to reduce defects and obtain a consistent and powerful planarization.</p>\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img src=\"/files/grish-asset-8d7f771034b2a872f3ce4d6f/CMP-Slurry.jpg\" alt=\"\" loading=\"lazy\" decoding=\"async\">\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t\t</div>\n\t\t</section>\n\t\t\t\t<section>\n\t\t\t\t\t\t<div>\n\t\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img src=\"/files/grish-asset-f5ffe66dbfe2bbd5dc991491/polishing.jpg\" alt=\"\" loading=\"lazy\" decoding=\"async\">\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t<h3>Uses and Functions of CMP Slurry</h3>\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t<p>CMP slurries are heterogeneous dispersions comprised of micro-abrasive particles dispersed in a chemically active mobile phase. They are primarily used in conjunction with lapping or rotary buffing equipment to remove small volumes of surface material from typically hard, crystalline workpieces.</p>\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t<p>CMP slurry is corrosive and should only be in contact with compatible materials. They are used to achieve highly smooth and planar material surfaces and are especially beneficial for semiconductor device manufacturing. Beyond the fact that it reduces rough topography to a planarized state, CMP also allows the device manufacturer to achieve global planarization of the entire wafer surface in a single step.</p>\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img src=\"/files/grish-asset-f5ffe66dbfe2bbd5dc991491/polishing.jpg\" alt=\"\" loading=\"lazy\" decoding=\"async\">\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t\t</div>\n\t\t</section>\n\t\t\t\t<section>\n\t\t\t\t\t\t<div>\n\t\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t<h3>Advantages of the grish CMP slurry</h3>\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t<p>The GRISH CMP Slurry offers several advantages over traditional slurries. Its uniform spherical SiO2 particles provide superior polishing results compared to other slurries, resulting in better Ra and TTV values.</p>\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t<p>Furthermore, it offers an excellent removal rate while maintaining the consistency of its polishing performance due to its ability to be recycled multiple times. The GRISH CMP Slurry is a superior choice for your CMP needs.</p>\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t<div>\n\t\t\t<div>\n\t\t\t\t\t\t<div>\n\t\t\t\t<div>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img src=\"/files/grish-asset-8fd7f4031aa492f5d7df01e3/CMP-Slurry.jpg\" alt=\"\" loading=\"lazy\" decoding=\"async\">\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t</div>\n\t\t\t\t</div>\n\t\t\t\t\t</div>\n\t\t</div>\n\t\t\t\t\t</div>\n\t\t</section>\n\t\t\t\t</div>\n\t\t    </div>\n</div>\n    \n<div>\n      <div>\n        <div>\n          <h2>Specifications</h2>\n        </div>\n        <div>\n          <ul>\n                        <li>\n              <div>\n                <strong>Specifications</strong>\n                <i></i>\n              </div>\n\n              <div>\n              <div>\n    <div>\n        <div>\n            <table>\n                <tbody>\n                    \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>Model  </td>\n                                                                                                        <td>Particlesize  </td>\n                                                                                                        <td>Particle appearance </td>\n                                                                                                        <td>pH </td>\n                                                                                                        <td>Viscosity </td>\n                                                                                                        <td>Concentration </td>\n                                                                                                        <td>Package </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>SOQ-12D </td>\n                                                                                                        <td>90nm-110nm </td>\n                                                                                                        <td rowspan=\"6\">Spherical </td>\n                                                                                                        <td>- </td>\n                                                                                                        <td>&lt;20cst  </td>\n                                                                                                        <td>20%  </td>\n                                                                                                        <td>- </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>SO-100-PF </td>\n                                                                                                        <td>90nm-110mm  </td>\n                                                                                                        <td rowspan=\"5\">10.5±0.5  </td>\n                                                                                                        <td rowspan=\"4\">&lt;10cst  </td>\n                                                                                                        <td rowspan=\"4\">20-50%  </td>\n                                                                                                        <td rowspan=\"6\">5kg 20kg  </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>SO-80-PF </td>\n                                                                                                        <td>70nm-90m </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>SO-60-PF  </td>\n                                                                                                        <td>50nm-70nm  </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>SO-40-PF  </td>\n                                                                                                        <td>30nm-50nm </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>SO-20-PF  </td>\n                                                                                                        <td>10nm-30nm </td>\n                                                                                                        <td>&lt;30cst </td>\n                                                                                                        <td>10-40% </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                    <tr>\n                                                                                                        <td>Testing instrument  </td>\n                                                                                                        <td>Laser particle analyzer </td>\n                                                                                                        <td>SEM/TEM </td>\n                                                                                                        <td>pH meter </td>\n                                                                                                        <td>Viscometer </td>\n                                                                                                        <td>Hydrometer </td>\n                                                            </tr>\n                                            \t\t\t\t\t\t                                                            </tbody>\n            </table>\n        </div>\n    </div>\n</div>\n                              \n              </div>\n            </li>\n            \n            <li>\n    <div>\n      <strong>Downloads</strong>\n      <i></i>\n    </div>\n\n    <div>\n      <table>\n        \n                                <tr>\n              <th>CMP Slurry</th>\n              <td><a href=\"/files/grish-asset-ded21179667c1357a1d4de4e/CMP-Slurry.pdf\">Download</a></td>\n            </tr>\n                        </table>\n    </div>\n  </li>\n          </ul>\n        </div>\n      </div>\n    </div>\n          \n  \n    \n<div>\n      <div>\n        <div>\n          <h2>Applications</h2>\n        </div>\n\n        <div>\n          <div>\n            <ul>\n                                              <li>\n                  <a href=\"/records/grish-led-semiconductor-665\">\n                    <div>\n                      <div><img src=\"/files/grish-asset-7f124a814294e065db6c0972/semiconductor-2-1.svg\" alt=\"\" loading=\"lazy\" decoding=\"async\"></div>\n                    </div>\n                    <div>\n                      <p>LED &amp; Semiconductor</p>\n                      <p>Grish provide polishing products for LED &amp; Semiconductor polishing. We offer both wet and dry polishing suspensions, as well as oil-based and water-based formulations.</p>\n                      <span>Read More<i></i></span>\n                    </div>\n                  </a>\n                </li>\n                                              <li>\n                  <a href=\"/records/grish-optical-glass-crystal-666\">\n                    <div>\n                      <div><img src=\"/files/grish-asset-933120db08286ffe2de4bfd5/glasses-2-1.svg\" alt=\"\" loading=\"lazy\" decoding=\"async\"></div>\n                    </div>\n                    <div>\n                      <p>Optical Glass &amp; Crystal</p>\n                      <p>We offer a wide range of polishing products for optics, glass, and gemstones industries. </p>\n                      <span>Read More<i></i></span>\n                    </div>\n                  </a>\n                </li>\n                                              <li>\n                  <a href=\"/records/grish-metal-parts-2075\">\n                    <div>\n                      <div><img src=\"/files/grish-asset-ad44604e4e6b909495b70068/lcd-2-1.svg\" alt=\"\" loading=\"lazy\" decoding=\"async\"></div>\n                    </div>\n                    <div>\n                      <p>Metal Polishing</p>\n                      <p>Grish specializes in providing polishing film, powder and slurry for hard alloy, stainless steel and curing molds polishing. Our products are designed to give you the best results possible, whether you're working on small or large surfaces. </p>\n                      <span>Read More<i></i></span>\n                    </div>\n                  </a>\n                </li>\n                                              <li>\n                  <a href=\"/records/grish-ceramic-precious-materials-726\">\n                    <div>\n                      <div><img src=\"/files/grish-asset-9ef92e939625d86d1dfc10d9/ceramic-2-1.svg\" alt=\"\" loading=\"lazy\" decoding=\"async\"></div>\n                    </div>\n                    <div>\n                      <p>Ceramic &amp; Precious Materials</p>\n                      <p>Grish provide powders and polishing slurry for Hard Ceramic, Sealing ring and Gemstone</p>\n                      <span>Read More<i></i></span>\n                    </div>\n                  </a>\n                </li>\n                          </ul>\n          </div>\n          \n          \n          \n        </div>\n      </div>\n    </div>\n        ",
  "summary": "GRISH CMP slurry is mainly based on colloids. The formula made through scientific proportioning can ensure the stability of pH value during the polishing process, thereby ensuring the stability of the polishing rate and saving time. CMP slurries are widely used in mechanical polishing of various nanoscale materials, such as sapphire materials, metals, composite crystals, etc.",
  "sections": [],
  "updated_at": "2026-10-16"
}