{
  "title": "Measurement unit - VK-X160K",
  "kind": "product",
  "company": "KEYENCE",
  "category": "Metrology & quality control",
  "parameters": {
    "model": "VK-X160K",
    "brand": "KEYENCE",
    "Total magnification": "Up to 19200×",
    "Field of view (minimum range)": "16 µm to 5400 µm",
    "Frame rate｜Laser measurement speed": "4 to 120 Hz, 7900 Hz",
    "Measurement principles｜Optical system": "Pinhole confocal optical system",
    "Measurement principles｜Light receiving element": "16-bit photomultiplier",
    "Measurement principles｜Scanning method (during general measurement and image stitching)": "Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII), poor reflected light intensity supplement (Double Scan)",
    "Height measurement｜Display resolution": "5 nm",
    "Height measurement｜Linear scale": "5 nm",
    "Height measurement｜Dynamic range": "16 bits",
    "Height measurement｜Repeatability σ": "20× 40 nm , 50× 20 nm , 100× 20 nm",
    "Height measurement｜Memory for Z-axis measurement": "1.4 million steps",
    "Height measurement｜Accuracy": "0.2+L/100 µm or less (L=Measuring Length)",
    "Z stage configuration｜Structure": "Base with separate measuring head",
    "Z stage configuration｜Maximum sample height": "28 mm 1.102\", 128 mm 5.039\" (option)",
    "Width measurement｜Display resolution": "10 nm",
    "Width measurement｜Repeatability 3σ": "20× 100 nm, 50× 50 nm, 100× 30 nm",
    "Width measurement｜Accuracy": "±2%",
    "XY stage configuration｜Manual: Operating range": "70 mm×70 mm 2.76\" × 2.76\"",
    "XY stage configuration｜Motorized: Operating range": "50 mm × 50 mm 1.97\" × 1.97\" 100 mm × 100 mm 3.94\" × 3.94\"",
    "Observation｜Observation image": "Super-high-resolution color CCD image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image",
    "Observation｜Maximum capture resolution": "3072×2304",
    "Weight｜Microscope unit": "Approx. 25 kg (sensor head detached: approx. 8.5 kg)"
  },
  "summary": "",
  "sections": [],
  "updated_at": "2026-10-11"
}