A large irregular rough surface with orange peel-like features visible to the naked eye on the wafer surface under fluorescent illumination. The orange peel defect can also be observed under interference phase contrast microscopy. The formation of orange peel is caused by uneven chemical thinning, unsuitable pH value of polishing solution and uneven rotation of polishing pads.
Product & technical reference
Orange Peel
A large irregular rough surface with orange peel-like features visible to the naked eye on the wafer surface under fluorescent illumination. The orange peel defect can also be observed under interference phase contrast microscopy. The formation of orange peel is caused by uneven chemical thinning, unsuitable pH value of polishing solution and uneven rotation of polishing pads.
Technical profile
| Manufacturer / publisher | GRISH / Beijing Grish Hitech |
|---|---|
| Brand / publisher | GRISH |
| Content type | glossary |
| Language | English |
| Category | Lapping, honing & superfinishing |
| Updated | 2026-10-16 |
GRISH published content
Source: https://grish.com/term/orange-peel/ · Original publication: 2022-09-23. Manufacturer claims and terminology are reproduced as source material.Explore Polishing glossary ↗
Source: https://grish.com/term/orange-peel/ · Original publication: 2022-09-23. Manufacturer claims and terminology are reproduced as source material.Explore Polishing glossary ↗
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