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POLISHX/Motorized XY Stage - VK-S105
Product / SKU

Motorized XY Stage - VK-S105

KEYENCE · Metrology & quality control

Technical specifications

Manufacturer / publisherKEYENCE
modelVK-S105
brandKEYENCE
Movement directionX and Y axes
Stroke50x50 mm1.969" x 1.969"
Table size100x100 mm3.937" x 3.937"
Guide methodCross roller guide
Feed methodPrecise pole screw, lead: 1 mm
Axis converted inertiaX axis: 9.29 × 10-7 kg·m2, Y axis: 9.62 × 10-7 kg·m2
Motor0.35 A/phase, 5-phase stepping motor, 5-wire pentagon wiring, holding torque: 0.017 N m, rotor inertia 4.2 g·cm2
Resolution1 µm
Positioning accuracy10 µm
Repeated positioning accuracy±1 µm
Rebound1 µm
Lost motion3 µm
Intuition (vertical/horizontal)5 µm
Parallelism AX: 10 µm, Y: 10 µm
XY squareness10 µm
Load capacity3 kg
Main material/outlineAluminum alloy, black alumite finish
Weight2.5 kg
CategoryMetrology & quality control
Updated2026-10-11

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