AxioImager Vario - long brochure
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Page 1
Maximum stability and precision for large samples
in materials analysis and quality control.
M ic ro s c o py f ro m C a r l Z ei s s
Axio Imager Vario
Dedicated to Large Sample Analysis
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2
In materials microscopy the size of the sample space is one
of the determining criteria when it comes to quality testing,
quality assurance and materials analysis as well as to the
development of future materials.
Axio Imager Vario, the new addition to the tried-and-tested
Axio Imager system series does justice to these demands
– with consistently high optical performance, functionality
and stability.
Axio Imager Vario stands for maximum precision combined
with the largest possible sample space – in research, develop-
ment and quality assurance – involving solar cells, wafers or
flat panel displays, for example.
At a glance –
The outstanding features of Axio Imager Vario:
• Stable column design
• Impressive sample space with vertical extension
up to 254 mm and sample travel range up to 300 mm
• Nosepiece focus with step-size resolution up to 10 nm
• Excellent optics with outstanding contrast
for the best resolution
• Reflected-light illuminator with apochromatically
corrected field lens
• Maximum precision and reproducibility
through motorized components
Exceeds all
Expectations
Title:
Mono-crystalline silicon solar cell
Circular Differential Interference Contrast
EC Epiplan-APOCHROMAT 50x / 0.95
Right:
Axio Imager.A2 Vario with MARC control unit and
Axio Imager.Z2 Vario with docking station and
transmitted-light module.
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Well-thought-out Components –
Perfectly Adapted to your Requirements
The column – High level stability
A column with aluminum base plate forms a stable basis for
the Axio Imager Vario microscope, while the precise guides
that have been integrated into the column allow exact ad-
justment of the sample space in the z-direction – from a
height of 0 to a maximum of 254 mm – according to the
objects being examined. Thanks to the lockable height stop,
the sample is reliably protected against damage.
The nosepiece focus –
Reliable focus and repeat accuracy
As the sample is brought into focus by moving the nose-
piece up and down, it is not necessary to move the sample
itself. This means, particularly in the case of heavy samples,
that it is possible to guarantee consistent focus and repeat
accuracy. Both stand variants – Axio Imager.A2 Vario and
Axio Imager.Z2 Vario – are equipped with a motorized
nosepiece focus, which has a 5 mm stroke and a step-size
resolution of 25 or 10 nm.
The sample is brought into focus simply by moving
the nosepiece up and down.
Available as an option: manual transmitted-light module, suitable for
Köhler illumination, for all common contrasting techniques.
Stable column design:
vibration-free working
5 mm
Axio Imager Vario offers a flexible system platform for research,
testing and development involving large material samples in areas
such as the solar, flat panel and wafer industries.
Operating elements for precise adjustment of the microscope module
in the z-direction and lockable height stop.
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The stages and sample holders – The perfect basis
Depending on the application, four different sample stages
for reflected-light and transmitted-light can be selected:
• manual stage with 200 mm travel range for
reflected-light and transmitted-light
• manual stage with 300 mm travel range for
reflected-light
• scanning stage with 200 mm travel range for
reflected-light and transmitted-light
• scanning stage with 300 mm travel range for
reflected-light and 200 mm travel range for
transmitted-light
The manual stages are equipped with a coupler which can
be used to switch between the regular x-y drive and a
handle for rapid movement. It is possible to control the
scanning stages with a repeat accuracy of 1 μm either via
the optional x/y drive on the Docking Station, via a separate
joystick or using the PC. Numerous different insert plates
and sample holders such as chucks for different wafer sizes,
ensure the flexibility needed to be able to analyze the wid-
est possible range of materials reliably. In the case of par-
ticularly tall samples, the sample stage can be dispensed
with entirely.
The transmitted-light module – Light from below
A manual transmitted-light module suitable for Köhler illu-
mination is available as an option for all common contrast-
ing techniques. This module can be equipped with halogen
or LED illumination. In addition to a luminous field dia-
phragm, it also has a switchable diffusion screen, as well
as an insert for a double filter wheel to hold neutral-density
filter sets. Four different condensers are available.
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The Microscope Modules
Perfectly Equipped – Manual or Motorized
Axio Imager.A2 Vario
The partially motorized microscope module Axio Imager.A2 Vario
offers a solid base for measurement, analysis and docu-
mentation in the area of materials microscopy. It is the
right choice for applications where, although a large sample
space is required, no motorization is necessary – for chang-
ing the contrasting technique or magnification, for example.
Light intensity and the motorized nosepiece focus (with 25
nm step-size resolution) can be adjusted conveniently us-
ing the freely positionable MARC (Manual Rotary Control)
control unit or PC, while coding of the key components al-
lows essential microscope parameters to be adopted by the
AxioVision software. The objective and total magnification,
contrasting techniques and brightness settings are stored
and can be retrieved at any time.
Whether for manual or motorized microscopy –
with its three available modules,
Axio Imager Vario offers the right solution
for every analysis need.
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Axio Imager.Z2 Vario
The powerful Axio Imager.Z2 Vario microscope module
is fully motorizable and therefore the perfect system for
complex applications and challenging tasks that demand a
high degree of automation. Your work is made considerably
easier thanks to the motorized reflected-light beam path,
which allows all light and contrast settings to be precisely
reproduced. All the motorized components of the micro-
scope module can be controlled via the docking station
(which is also freely positionable) or PC – ensuring a high
degree of operating comfort and reproducibility. The inte-
grated user administration also means that work can be
managed simply and clearly in a multi-user environment.
Use of the MARC control unit is also an option.
In addition to reflected light, both Axio Imager.A2 Vario and Axio Imager.Z2 Vario
microscope modules can be equipped with the manual transmitted-light
unit and can be freely combined with the sample stages available.
Axio Imager.Z2 Vario without focus
Axio Imager.Z2 Vario without focus is the third microscope module avail-
able. Apart from the nosepiece focus, it offers the same functionality as
Axio Imager.Z2 Vario. This model is recommended for situations in which
the microscope module is integrated into custom solutions that make use
of the external focus drive of the customer’s own system. Once again,
this microscope module, together with the optional Control Box, can
also be controlled via the Docking Station or a PC.
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Further information
can be found at
www.zeiss.de/objectives
The Optics –
Brilliant Vision
Axio Imager Vario is the logical continuation of the Axio Imager family,
with its tried-and-tested, renowned optical performance.
The illumination concept –
Information in brilliant quality
You will see your objects in brightfield and darkfield in proven
outstanding quality. Stray light has been minimized and im-
aging is virtually aberration free. Excellent image contrasts
is achieved, especially in interference contrast and even at
high magnifications.
The objective series –
Experience Enhanced Contrast (EC)
To obtain comprehensive image information, you need to
use a wide range of objectives. With the Axio Imager Vario
objective series, Carl Zeiss has provided solutions for all kinds
of requirements, in various price and performance categories.
EC EPIPLAN Objectives
The economical, all-around series of objectives, which have
been achromatically corrected and strain-minimized for
impressive-quality DIC create a flat field image for an inter-
mediate image size of 23 mm and are available in brightfield
or brightfield/darkfield variants. The exit pupils are always
identically positioned, and Differential Interference Contrast
in circularly polarized light is possible with all EC EPIPLAN
objectives using a single C-DIC prism.
EC Epiplan-NEOFLUAR Objectives
The particularly high-contrast EC Epiplan-NEOFLUAR objec-
tives, which have been corrected to a high degree and strain
minimized, enable you to achieve sharp C-DIC and create a
flat, 25 mm field of view – ideal for displaying fine color and
structural details, e.g. lamellae in spherulitic graphite. Avail-
able as DIC/C-DIC, Brightfield/ Darkfield, Pol and LD (long
working distance) variants, they also offer the additional ben-
efits of long working distances and high numerical apertures.
EC Epiplan-APOCHROMAT Objectives
The EC Epiplan-APOCHROMAT objectives satisfy the very
highest demands. They are ideal for imaging color and struc-
tural details in the sub-micrometer range and are renowned
for offering the best correction and highest numerical aper-
tures. Based on ICS optics from Carl Zeiss, these innovative
Enhanced Contrast objectives perform at the limits of what
optics can achieve with regard to contrast and reproduction
accuracy.
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Axio Imager Vario also offers you
the convenience of being able
to control all functions remotely.
Greater comfort, simpler
changing of contrasting
techniques: The modulator
turret for interference
contrast.
The tube lens turret – Increase your flexibility
With its flexible magnification range, the Axio Imager Vario
tube lens turret offers greater variability when it comes to
adapting the desired frame. The tube lens turret is avail-
able in two variants: 1) Encoded: this variant allows you
to achieve an exact magnification and automatically save
the scaling factors that can be derived from this in the
image for the analysis. Measurement results are reliable,
documentable and reproducible. 2) Motorized: this variant
offers you additional operating comfort for your system
solutions. And Axio Imager Vario tube lens turret offers yet
another advantage: the use of a focusable Bertrand lens,
an important component for the easy observation of the
objective exit pupil.
The modulator turret – Easy to operate
Switching quickly and easily from one contrasting technique
to another – the C-DIC modulator turret has been developed
precisely with this goal in mind. Each of the four positions
can be conveniently selected with a simple turn. The motor-
ized variant is particularly easy to operate. When switching
to interference contrast, the correct module with the setting
you have previously defined is automatically activated. If you
switch to brightfield or darkfield, the blank position will also
be automatically selected for fast and, above all, reproduc-
ible results.
The nosepiece – Flexibility in detail
The nosepiece provides room for up to seven objectives. You
now have a sufficient number of objectives to use the entire
standard magnification series. This increases reliabilty and the
sample throughput rate. Naturally, it is also possible to com-
bine objectives.
The reflector turret – Switching made easy
All Push&Click contrast modules can be stored securely in
six or ten positions and activated as needed using manual
or motorized method.
More options, faster handling:
The reflector turrets with
Push & Click Modules.
The motorized diaphragms – Constant image quality
Using the motorized aperture and luminous field dia-
phragms you can achieve error-free, reproducible settings
and, consequently, constant image conditions. Motorization
guarantees you comparable results and higher productivity
by automating the workflow.
The aperture diaphragm – Simple, but clever
It is often simple optimized detail that can improve your
day-to-day work. A perfect example of this is the newly
developed aperture diaphragm from Carl Zeiss.
This is a slider with a motorized aperture-diaphragm re-
volver. The special feature is a disk with fixed diaphragms
that rotates rather than the usual aperture iris that is opened
and closed. Thanks to this improved component, we are
able to guarantee you a twofold advantage: greater repeat
accuracy and a longer life for the component.
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Test structures, period 1.6 μm EC Epiplan-APOCHROMAT 50x / 0.95,
8 / 0, camera-adapter 0.63x
Surface of a silicon wafer
recorded with a 5x EC
Epliplan-APOCHROMAT
objective. The same point
is shown in three differ-
ent contrasting techniques:
Brightfield, darkfield
and C-DIC. Thanks to the
different contrasting,
different details become
visible on the surface of the
wafer in each case.
Brightfield
Darkfield
C-DIC
The Contrasting Techniques –
Observing in New Dimensions
Brightfield and darkfield – Maximum homogeneity
and a stray light free image background
In brightfield the Axio Imager Vario provides homogeneous
illumination and exceptional contrast while, in darkfield,
the background is so dark that the technique has earned
a special name: ADF – Advanced Darkfield. By minimizing
disturbing stray light and reducing the longitudinal color
aberration of the illumination optics, this darkfield is suit-
able for the most challenging of samples and impresses
even when faced with the finest of structures. Switching
between techniques only requires a simple turn. The mo-
torized stand models allow you to work particularly quickly
and conveniently.
C-DIC – Perfect for all structures
Circular Differential Interference Contrast (C-DIC) is an opti-
cal polarization procedure that, in contrast to the common
differential interference contrast (DIC), works with circular,
polarized light. The advantages of this procedure are crucial
for the contrasting of diverse directed object structures.
There is no longer the need for the preparation be turned in
the azimuth – with the C-DIC, a simple turn in the operating
element of the C-DIC slider or modulator turret is sufficient
and all successive object information can be captured. Ad-
ditionally, it also allows for every chosen fragmentation of
every directed structure to be adjusted. This means that with
one DIC prism, a high contrast as well as a high resolution
can be achieved.
Numerous imaging options improve the visualization of your samples.
For demanding tasks, Carl Zeiss’ innovative C-DIC technique makes it possible
to achieve a clearly visible improvement in your results.
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The Software –
Utilizing Modularity
In the fields of material research and design, requirements and areas of application are changing.
Modular and customizable, the AxioVision image analysis software, combines with Axio Imager Vario
in order to offer you maximum flexibility and capability when analyzing your images.
AxioVision Basic
AxioVision offers you automated control of your ZEISS
microscope, allowing you to acquire, analyze and docu-
ment features such as crystalline microstructures in your
samples in a single operation. Only AxioVision enables
you to benefit from the ZVI image format, developed by
Carl Zeiss specifically for microscopy. The quality, content
and meaningfulness of your valuable images are retained
with no loss of information and with the added benefit of
integrated documentation of the imaging conditions – es-
sential for repeatability and the validation of your data.
Depending on your requirements, the functionality of your
selected system can be expanded to include various mod-
ules or adapted to individual applications, meaning that
you have an expandable solution for your microscopy ap-
plications.
MosaiX
Developed to enable you to aquire images of large ob-
jects, MosaiX scans your samples in their entirety in just
one process. An overall image is then created from the
individual image tiles. This serves as an ideal overview im-
age for navigating around the sample or as the basis for
further analyses. From the MosaiX image you can perform
measurements that cross image fields – the tiles present no
restriction – allowing you to gain valuable insights into the
context and relationships of features of interest.
MosaiX image of a
gearwheel, 15 x 20 tiles.
Simple, clearly presented
user interface for camera
control and image
acquisition.
Detailed view: individual
tile of the MosaiX image.
Page 12
High-quality 1.4 megapixel
camera with good signal
quality and a large dynamic
range
High-quality 5 megapixel
camera with good signal
quality
12
The Cameras –
Preserving What You See
Axio Imager Vario provides an outstanding platform for using a wide range
of cameras, with the AxioCam family of Carl Zeiss forming the ideal combination.
Entry Level
AxioCam MRc
AxioCam MRc5
Mid-Range
High-End
The AxioCam family – Flexibility and performance
As customized components in the Carl Zeiss Systems envi-
ronment, camera, microscope and software are perfectly
matched to form a system solution in digital imaging that
opens up new perspectives – in the areas of performance,
flexibility and operating comfort and for both research and
routine applications. Axio Imager Vario microscope platform
offers great flexibility in camera use thanks to its standard-
ized camera ports (C Mount) in the stand and a complete
assortment of camera adaptors. From digital compact cam-
eras (e.g., from Canon) up to professional, research-grade
cameras of the Carl Zeiss AxioCam family, a wide variety
of cameras are supported by the AxioVision image capture
and analysis software. All digital cameras from Carl Zeiss
are offered complete with a free entree-level version of
AxioVision and guarantee optimal image quality.
Some models are also available in a black and white ver-
sion with an extended sensitivity range. The sophisticated
integration of Carl Zeiss cameras delivers important advan-
tages: high speed, correct resolution, optimized live im-
ages or automatic exposure adjustment. All cameras in the
AxioCam family are controlled via a uniform user interface
in AxioVision. Naturally, you can also adapt the camera
operation individually to the wide range of applications
you work on.
Economical CCD cameras
with 1.4 or 3.3 megapixel
AxioCam ICc
AxioCam HRc
13 megapixel camera with maximum
resolution, extremely flexible settings
and the maximum possible signal quality
Economical and extremely
flexible 5 megapixel
CMOS camera
AxioCam ERc 5s
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The Ergonomics –
Relax While You Work
The Ergophototube – Relaxed work
For applications where great importance is attached to ergonomics, two
different Ergophototubes are available: the Ergophototube with an upright,
unreversed image, 44 mm continuous height adjustment and 20° viewing
angle and the Comfort-Ergophototube with an upright, unreversed image,
50 mm continuous height adjustment and continuous horizontal extension
of 50 mm and 15° viewing angle.
The docking station – Remote Microscopy
The freely positionable docking station operating module makes it possible
to control the light intensity and all motorized components of the
Axio Imager.Z2 Vario. It has a coarse and fine focus drive, a freely program-
mable ring of buttons and a touch screen (TFT). In order to simplify complex
steps, all the main functions have been grouped together on the touch-screen.
This allows you to control all motorized components easily at the touch of
a button and to display and control the microscope status. If required, the
integrated light and contrast managers ensure the best possible light and
contrast setting. In addition to fixed presettings, it is also possible to store
complex procedures as individual settings and retrieve them at any time on
a user-specific basis with just the touch of a button. Axio Imager.Z2 Vario is
therefore ideal fore use even in a multi-user environment.
MARC (Manual Rotary Control) – Numerous functions all in one place
The control unit MARC enables you to control key microscope functions,
which can all be operated intuitively and extremely conveniently using just
one hand via the coarse and fine drive knob and a ring of buttons.
Depending on the microscope module connected, MARC can be used in
different ways: with Axio Imager.A2 Vario the unit is also used – in addition
to focusing and the brightness control – to open and close the shutter to
the light intensity values of the nosepiece position and to switch between
reflected-light and transmitted-light.
In the case of Axio Imager.Z2 Vario, on the other hand, MARC can be used
as an optional control unit alongside the docking station. In this case the
configuration of the buttons reflects the ring of buttons on the docking sta-
tion. Users who prefer working with two focus drive knobs can therefore
use MARC and the docking station at the same time in parallel. MARC can
either be positioned freely using the tabletop base or attached to manual
stages close to the x-y drive. The advantage of this is that the user can focus,
control brightness and move the sample with just one hand.
For users who want or need to sacrifice direct viewing into the micro-
scope, a tube module is available without an eyepiece for viewing.
The Comfort-Ergotube allows the user to adopt a relaxed position
even when working with large sample stages.
The docking station offers the possibility of controlling the motorized
stage via an optional coaxial drive.
The MARC control unit allows the key functions to be controlled
intuitively and extremely conveniently with just one hand.
50 mm continuous
height adjustment.
50 mm continuous
horizontal extension.
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Axio Imager Vario
Technical Data
Component
Option
Axio Imager.A2
Vario
Axio Imager.Z2
Vario
Axio Imager.Z2
Vario without focus
Stand
manual
+
-
-
motorized
-
+
+
Control box
-
+
+
O
Coding (can be read out from PC) -
+
+
+
Remote control
MARC
+
O
O
Docking Station with TFT
-
O
O
Contrast manager
-
-
+
+
Light manager
-
+*
+**
+**
Tube lens turret
coded
O
-
-
motorized
-
O
O
Reflector turret
6-pos. coded
+
-
-
6-pos. motorized
-
O
O
6-pos. motorized ACR
-
O
O
Nosepiece
6-pos. coded POL Vario
O
-
-
6-pos. coded BD DIC Vario
O
-
-
6-pos. motorized POL Vario
-
O
O
6-pos. motorized BD DIC
-
O
O
7-pos. motorized BD
-
-
O
Modulator turret for C-DIC/TIC
manual
O
O
O
motorized
-
O
O
Transmitted-light illumination
manual
O
O
O
Double filter wheel
(transmitted light)
manual
O
O
O
motorized
-
-
-
Reflected-light illumination
manual
+
-
-
motorized
-
+
+
Luminous field diaphragm
(reflected light)
manual
+
O
O
motorized
-
O
O
Aperture diaphragm
(reflected light)
manual
O
O
O
motorized
-
O
O
Aperture diaphragm
(reflected light) with
aperture-diaphragm revolver
motorized
-
O
O
Double filter wheel
(reflected light)
manual
O
O
O
motorized
-
O
O
FL attenuator
manual
O
O
O
motorized
-
O
O
Light switching
reflected light/transmitted light
manual
O***
+
+
via Docking Station / MARC
O***
O***
O***
Mixed light
manual
O****
O****
O****
via Docking Station
-
O***
O***
Nosepiece focus
motorized,
10 nm step size resolution
-
+
-
motorized,
25 nm step size resolution
+
-
-
Apotome
-
O
O
O
Scanning stages
DC stepper motors
O
O
O
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Microscope module
Axio Imager.A2
Vario
Axio Imager.Z2
Vario
Axio Imager.Z2
Vario without focus
Height of sample space
0 - 254 mm (reflected light, without stage)
0 - 112 mm (reflected light, with stage)
0 - 88 mm (transmitted light, with stage)
0 - 254 mm (reflected light, without stage)
0 - 112 mm (reflected light, with stage)
0 - 88 mm (transmitted light, with stage)
-
Stroke of nosepiece focus
5 mm
5 mm
-
Depth of sample space
385 mm (optical axis to column)
385 mm (optical axis to column)
-
Maximum travel range of stages
300 mm x 300 mm
300 mm x 300 mm
-
Maximum transmitted-light area
200 mm x 200 mm
200 mm x 200 mm
-
Dimensions
of microscope module
180 x 260 x 420 mm (height x width x depth)
Mass of microscope module
17.5 to 20 kg depending on equipment
Mass of base plate and column
approx. 78 kg
approx. 78 kg
-
Dimensions of base plate
700 mm x 574 mm (width x depth)
700 mm x 574 mm (width x depth)
-
Eyepiece
Field of view number 23 or 25
Objective magnification
1x - 150x
Objectives
Reflected light:
EC EPIPLAN, EC Epiplan-NEOFLUAR, EC Epiplan-APOCHROMAT
Transmitted light:
N-ACHROPLAN, EC Plan-NEOFLUAR, Plan-APOCHROMAT, C-APOCHROMAT, FLUAR
Special:
LD EPIPLAN, LD EC Epiplan-NEOFLUAR
Tubes
Tube without binocular eyepiece, binocular tubes, phototubes, ergotubes and ergophototubes
Stages
Manual mechanical stages and motorized scanning stages for reflected light and transmitted light
with travel ranges of 200 mm x 200 mm or 300 mm x 300 mm
Illumination
12V 100W HAL, 100W HBO, VIS LED
Contrasting techniques
Reflected light:
brightfield, darkfield, differential interference contrast, circular differential interference contrast,
simple polarization, fluorescence
Transmitted light: brightfield, darkfield, differential interference contrast, polarization, phase contrast
+
Included with stand
O
Optional
-
Not possible
*
Light manager manual Imager
**
Light manager motorized Imager
***
With additional CAN-power supply
**** With additional power supply
Page 16
Information subject to change.
Printed on environmentally friendly paper
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70-2-0071/e – printed 06.10
Carl Zeiss MicroImaging GmbH
07740 Jena, Germany
Industrial | Göttingen Location
Phone : +49 551 5060 660
Telefax : +49 551 5060 464
E-Mail : micro@zeiss.de
www.zeiss.de/axioimagervario
At a glance – The outstanding
features of Axio Imager Vario:
• Stable column design
• Impressive sample space with vertical extension
up to 254 mm and sample travel range up to 300 mm
• Nosepiece focus with step-size resolution up to 10 nm
• Excellent optics with outstanding contrast
for the best resolution
• Reflected-light illuminator with apochromatically
corrected field lens
• Maximum precision and reproducibility
thanks to motorized components