A combination of mechanical grinding and chemical etching, it forms a smooth and flat surface on the surface of the product with the help of the ultra-micro particles grinding and chemical etching.
Product & technical reference
Chemical-Mechanical Planarization(CMP)
A combination of mechanical grinding and chemical etching, it forms a smooth and flat surface on the surface of the product with the help of the ultra-micro particles grinding and chemical etching.
Technical profile
| Manufacturer / publisher | GRISH / Beijing Grish Hitech |
|---|---|
| Brand / publisher | GRISH |
| Content type | glossary |
| Language | English |
| Category | Lapping, honing & superfinishing |
| Updated | 2026-10-16 |
GRISH published content
Source: https://grish.com/term/chemical-mechanical-planarization-polish-cmp/ · Original publication: 2022-09-23. Manufacturer claims and terminology are reproduced as source material.Explore Polishing glossary ↗
Source: https://grish.com/term/chemical-mechanical-planarization-polish-cmp/ · Original publication: 2022-09-23. Manufacturer claims and terminology are reproduced as source material.Explore Polishing glossary ↗
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