Measurement head - VK-X4100

KEYENCE · Metrology & quality control

Technical specifications

Manufacturer / publisher	KEYENCE
model	VK-X4100
brand	KEYENCE
Type	Measurement head
Total magnification	42 to 28800×
Field of view	11 to 7398 μm
Measurement principle	Laser confocal, Focus variation, White light interferometry, Spectral interference
Laser wavelength	Semiconductor laser, 404 nm
Max. laser measurement speed	Surface: 125 Hz, Line: 7900 Hz
Max. laser output	1.0 mW
Laser class	Class 2 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10)
Laser light-receiving element	16-bit photomultiplier
White-light-receiving element	High-definition color CMOS
Laser confocal｜Height display resolution	0.1 nm
Laser confocal｜Height repeatability σ	10×: 100 nm, 20×: 40 nm, 50×: 12 nm
Laser confocal｜Height accuracy	0.2+L/ 100 μm or less
Laser confocal｜Width display resolution	0.1 nm
Laser confocal｜Width repeatability 3σ	10×: 200 nm, 20×: 100 nm, 50×: 40 nm
Laser confocal｜Width accuracy	Measured value ±2% or less
Focus variation｜Height display resolution	0.1 nm
Focus variation｜Height repeatability σ	5×: 500 nm, 10×: 100 nm, 20×: 50 nm, 50×: 20 nm
Focus variation｜Height accuracy	0.2+L/ 100 μm or less
Focus variation｜Width display resolution	0.1 nm
Focus variation｜Width repeatability 3σ	5×: 400 nm, 10×: 400 nm, 20×: 120 nm, 50×: 50 nm
Focus variation｜Width accuracy	Measured value ±2% or less
White light interferometry｜Height display resolution	0.01 nm
White light interferometry｜Width display resolution	0.1 nm
Category	Metrology & quality control
Updated	2026-10-11