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POLISHX/Wide-Area 3D Measurement System Head - VR-5200
Product / SKU

Wide-Area 3D Measurement System Head - VR-5200

KEYENCE · Metrology & quality control

Technical specifications

Manufacturer / publisherKEYENCE
modelVR-5200
brandKEYENCE
TypeHead
ControllerVR-5000
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 12×|Horizontal24.0 mm 0.94"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 12×|Vertical18.0 mm 0.71"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 25×|Horizontal12.0 mm 0.47"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 25×|Vertical9.0 mm 0.35"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 38×|Horizontal8.0 mm 0.31"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 38×|Vertical6.0 mm 0.24"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 50×|Horizontal6.0 mm 0.24"
Field-of-view|Low magnification (wide field of view)|Magnification on a 15" monitor 50×|Vertical4.5 mm 0.18"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 40×|Horizontal7.6 mm 0.30"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 40×|Vertical5.7 mm 0.22"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 80×|Horizontal3.8 mm 0.15"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 80×|Vertical2.9 mm 0.11"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 120×|Horizontal2.5 mm 0.10"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 120×|Vertical1.9 mm 0.07"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 160×|Horizontal1.9 mm 0.07"
Field-of-view|High magnification (high resolution)|Magnification on a 15" monitor 160×|Vertical1.4 mm 0.06"
Zoom1× to 4×
Height measurement|Display resolution0.1 µm
Height measurement|Height measurementrange|Without Z stitchingLow magnification (wide field of view) : 10 mm 0.39" High magnification (high resolution) : 1 mm 0.04"
Height measurement|Height measurementrange|With Z stitchingLow magnification (wide field of view) : 50 mm 1.97" High magnification (high resolution) : 30 mm 1.18"
Height measurement|Repeatability (σ)|Without Z stitching0.4 µm
CategoryMetrology & quality control
Updated2026-10-11

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