Product / SKU
Measurement unit - VK-X160K
KEYENCE · Metrology & quality control
Technical specifications
| Manufacturer / publisher | KEYENCE |
|---|---|
| model | VK-X160K |
| brand | KEYENCE |
| Total magnification | Up to 19200× |
| Field of view (minimum range) | 16 µm to 5400 µm |
| Frame rate｜Laser measurement speed | 4 to 120 Hz, 7900 Hz |
| Measurement principles｜Optical system | Pinhole confocal optical system |
| Measurement principles｜Light receiving element | 16-bit photomultiplier |
| Measurement principles｜Scanning method (during general measurement and image stitching) | Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII), poor reflected light intensity supplement (Double Scan) |
| Height measurement｜Display resolution | 5 nm |
| Height measurement｜Linear scale | 5 nm |
| Height measurement｜Dynamic range | 16 bits |
| Height measurement｜Repeatability σ | 20× 40 nm , 50× 20 nm , 100× 20 nm |
| Height measurement｜Memory for Z-axis measurement | 1.4 million steps |
| Height measurement｜Accuracy | 0.2+L/100 µm or less (L=Measuring Length) |
| Z stage configuration｜Structure | Base with separate measuring head |
| Z stage configuration｜Maximum sample height | 28 mm 1.102", 128 mm 5.039" (option) |
| Width measurement｜Display resolution | 10 nm |
| Width measurement｜Repeatability 3σ | 20× 100 nm, 50× 50 nm, 100× 30 nm |
| Width measurement｜Accuracy | ±2% |
| XY stage configuration｜Manual: Operating range | 70 mm×70 mm 2.76" × 2.76" |
| XY stage configuration｜Motorized: Operating range | 50 mm × 50 mm 1.97" × 1.97" 100 mm × 100 mm 3.94" × 3.94" |
| Observation｜Observation image | Super-high-resolution color CCD image 16-bit laser color confocal image Confocal + ND filter optical system C-laser differential interference image |
| Observation｜Maximum capture resolution | 3072×2304 |
| Weight｜Microscope unit | Approx. 25 kg (sensor head detached: approx. 8.5 kg) |
| Category | Metrology & quality control |
| Updated | 2026-10-11 |
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