Product / SKU
Motorized XY Stage - VK-S110
KEYENCE · Metrology & quality control
Technical specifications
| Manufacturer / publisher | KEYENCE |
|---|---|
| model | VK-S110 |
| brand | KEYENCE |
| Movement direction | X and Y axes |
| Stroke | 100x100 mm3.937" x 3.937" |
| Table size | 140x140 mm5.512" x 5.512" |
| Guide method | Cross roller guide |
| Feed method | Precise pole screw, lead: 1 mm |
| Axis converted inertia | X axis: 9.29 × 10-7 kg·m2, Y axis: 9.62 × 10-7 kg·m2 |
| Motor | 0.35 A/phase, 5-phase stepping motor, 5-wire pentagon wiring, holding torque: 0.017 N m, rotor inertia 4.2 g·cm2 |
| Resolution | 1 µm |
| Positioning accuracy | 10 µm |
| Repeated positioning accuracy | ±1 µm |
| Rebound | 1 µm |
| Lost motion | 3 µm |
| Intuition (vertical/horizontal) | 15 µm |
| Parallelism A | X: 20 µm, Y: 20 µm |
| XY squareness | 15 µm |
| Load capacity | 3 kg |
| Main material/outline | Aluminum alloy, black alumite finish |
| Weight | 3.7 kg |
| Category | Metrology & quality control |
| Updated | 2026-10-11 |
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