CMP Slurry
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Take a Closer Look at CMP Slurry
What is a CMP slurry?
CMP Slurry, also known as Chemical Mechanical Planarization, is a liquid dispersion containing active chemicals and micro-abrasive grains used for a variety of industrial applications. This process removes materials by a combination of chemical and mechanical action and is composed of oxidizers, chelating agents, and corrosion inhibitors.
When used in semiconductor and membrane production, the CMP slurry is designed to precisely remove materials from a given surface in order to reduce defects and obtain a consistent and powerful planarization.
Uses and Functions of CMP Slurry
CMP slurries are heterogeneous dispersions comprised of micro-abrasive particles dispersed in a chemically active mobile phase. They are primarily used in conjunction with lapping or rotary buffing equipment to remove small volumes of surface material from typically hard, crystalline workpieces.
CMP slurry is corrosive and should only be in contact with compatible materials. They are used to achieve highly smooth and planar material surfaces and are especially beneficial for semiconductor device manufacturing. Beyond the fact that it reduces rough topography to a planarized state, CMP also allows the device manufacturer to achieve global planarization of the entire wafer surface in a single step.
Advantages of the grish CMP slurry
The GRISH CMP Slurry offers several advantages over traditional slurries. Its uniform spherical SiO2 particles provide superior polishing results compared to other slurries, resulting in better Ra and TTV values.
Furthermore, it offers an excellent removal rate while maintaining the consistency of its polishing performance due to its ability to be recycled multiple times. The GRISH CMP Slurry is a superior choice for your CMP needs.
Specifications
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Specifications
Model Particlesize Particle appearance pH Viscosity Concentration Package SOQ-12D 90nm-110nm Spherical - <20cst 20% - SO-100-PF 90nm-110mm 10.5±0.5 <10cst 20-50% 5kg 20kg SO-80-PF 70nm-90m SO-60-PF 50nm-70nm SO-40-PF 30nm-50nm SO-20-PF 10nm-30nm <30cst 10-40% Testing instrument Laser particle analyzer SEM/TEM pH meter Viscometer Hydrometer -
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Applications
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LED & Semiconductor
Grish provide polishing products for LED & Semiconductor polishing. We offer both wet and dry polishing suspensions, as well as oil-based and water-based formulations.
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Optical Glass & Crystal
We offer a wide range of polishing products for optics, glass, and gemstones industries.
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Metal Polishing
Grish specializes in providing polishing film, powder and slurry for hard alloy, stainless steel and curing molds polishing. Our products are designed to give you the best results possible, whether you're working on small or large surfaces.
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Ceramic & Precious Materials
Grish provide powders and polishing slurry for Hard Ceramic, Sealing ring and Gemstone
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